Regulus 8100 | Regulus 8220 | Regulus 8230 | Regulus 8240 | ||||
---|---|---|---|---|---|---|---|
Secondary Electron Resolution | 0.7 nm (Vacc:
15 kV) 0.8 nm (Landing voltage: 1 kV)*3 |
0.6 nm (Vacc: 15 kV) 0.7 nm (Landing voltage: 1 kV)*3 |
|||||
Accelerating voltage | 0.5~30 kV | 0.5~30 kV | |||||
Landing voltage*3 | 0.1~2 kV | 0.01~20 kV | |||||
Mag. | 20~1,000,000 ×*4 | 20~2,000,000 ×*4 | |||||
Specimen stage | Stage control | 3-axis motor drive*5 | 5-axis motor drive | ||||
Movable range | X | 0~50 mm | 0~50 mm | 0~110 mm | 0~110 mm | ||
Y | 0~50 mm | 0~50 mm | 0~110 mm | 0~80 mm | |||
R | 360° | ||||||
T | -5~70° | ||||||
Z | 1.5~30 mm | 1.5~40 mm | |||||
Stage repeatability | - | - | - | Less than ±0.5 µm |