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Electron Microscopy

Ultra-high Resolution Field Emission Scanning Electron Microscope Regulus Series

As a new brand of FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, Regulus8220, Regulus8230, and Regulus8240, all of which extend the functions of the SU8200 series with the use of a common platform.

With optimized electron optical systems, the new Regulus series features resolutions down to 0.7 nm in the Regulus8220/8230/8240 models and 0.8 nm in the Regulus8100 model.

The Regulus series employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images up to 2 million times,*1 compared with 1 million times in previous models.

User-support functions have also been enhanced so that the advanced performance of the series can be fully leveraged, including functions to assist the operation of the signal detection system for analyzing diverse types of materials, as well as device-maintenance functions.

*1  Only in Regulus8220/8230/8240

Features

New Source and Detection Technology from Hitachi

•  Cold field emission (CFE) gun optimized for low-voltage, high-resolution     imaging with low aberration
    (Regulus8220/8230/8240: 0.7 nm/1 kV; Regulus8100: 0.8 nm/1 kV)
•  Maximum magnification doubled from 1 million times to 2 million     times*2
•  User-support functions to ensure high performance

HR & ULV Imaging


Specimen: Gold particle on Carbon
Landing voltage: 10 V


UHR imaging


Specimen: Catalyst
Accelerating voltage: 30 kV


HR & LV EDX analysis


Specimen: Tin ball
Landing voltage: 1.5 kV

*2 Only in Regulus8220/8230/8240

Specifications
 
Regulus 8100 Regulus 8220 Regulus 8230 Regulus 8240
Secondary Electron Resolution 0.7 nm (Vacc: 15 kV)
0.8 nm (Landing voltage: 1 kV)*3
0.6 nm (Vacc: 15 kV)
0.7 nm (Landing voltage: 1 kV)*3
Accelerating voltage 0.5~30 kV 0.5~30 kV
Landing voltage*3 0.1~2 kV 0.01~20 kV
Mag. 20~1,000,000 ×*4 20~2,000,000 ×*4
Specimen stage Stage control 3-axis motor drive*5 5-axis motor drive
Movable range X 0~50 mm 0~50 mm 0~110 mm 0~110 mm
Y 0~50 mm 0~50 mm 0~110 mm 0~80 mm
R 360°
T -5~70°
Z 1.5~30 mm 1.5~40 mm
Stage repeatability - - - Less than ±0.5 µm

*3  Observation in beam deceleration mode
*4  Magnification specified based on a display size of 127 mm × 95 mm
*5 The 5-axis motor drive is an option for the Regulus8100

 

Ultra-high Resolution Field Emission Scanning Electron Microscope Regulus  Series

Field Emission Scanning Electron Microscope (FE-SEM)

• Ultra-high Resolution   Field Emission Scanning   Electron Microscope   SU9000

• Ultra-high Resolution   Field Emission Scanning   Electron Microscope   Regulus Series

• Ultra-High-Resolution   Schottky Field Emission   Scanning Electron   Microscope SU7000

• Schottky Field Emission   Scanning Electron   Microscope SU5000

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