Items | Product Features | ||
---|---|---|---|
SU3800 | SU3900 | ||
Secondary Electron Resolution | 3.0 nm (accelerating voltage 30 kV, WD=5 mm, high vacuum mode) | ||
15.0 nm (accelerating voltage 1 kV, WD=5 mm, high vacuum mode) | |||
Backscattered Electron Resolution | 4.0 nm (accelerating voltage 30 kV, WD=5 mm, low vacuum mode) | ||
Magnification | ×5 to ×300,000 (magnification of image*1) | ||
×7 to ×800,000 (magnification of actual display*2) | |||
Accelerating Voltage | 0.3 kV to 30 kV | ||
Low Vacuum Mode Setting | 6 to 650 Pa | ||
Image Shift | ± 50 µm (WD=10 mm) | ||
Maximum Specimen Size | Φ 200 mm | Φ 300 mm | |
Specimen Stage | X | 0 to 100 mm | 0 to 150 mm |
Y | 0 to 50 mm | 0 to 150 mm | |
Z | 5 to 65 mm | 5 to 85 mm | |
R | 360° in continuous mode | ||
T | -20 to +90° | ||
Maximum Movable Range | Φ 130 mm (in combination with R) | Φ 200 mm (in combination with R) | |
Maximum Movable Height | 80 mm (WD= 10 mm) | 130 mm (WD= 10 mm) | |
Motor Drive | 5-axis motor drive | ||
Electron Optics | Electron-Gun | Pre-centered cartridge type tungsten hairpin filament | |
Objective-Lens Aperture | 4-hole movable aperture | ||
Detectors | Secondary electron detector, sensitive semiconductor backscattered electron detector | ||
WD for EDX analysis | WD=10 mm (T.O.A=35°) | ||
Image Display | Auto-Axis Alignment. Function | Beam control : auto (AFS→ABA→AFC→ABCC) | |
Optical axis adjustment: auto (current alignment) | |||
Beam brightness: auto | |||
Auto Image Adjustment Function | Auto brightness and contrast control (ABCC) | ||
Auto focus control (AFC) | |||
Auto stigma and focus (ASF) | |||
Auto filament saturation (AFS) | |||
Auto beam alignment (ABA) | |||
Auto start (HV-ON→ABCC→AFC) | |||
Operation Auxiliary Function | Raster rotation, dynamic focus, image improvement function, Data input (point-to-point measurement, angle measurement, texts),preset magnification, Stage positioning navigation function (SEM MAP), beam marking function | ||
Optional function | ■Hardware: Track ball, Joystick, Operation panel, Compressor, Ultra sensitive low vacuum detector (UVD), Chamber scoop, Camera navigation system ■Software: SEM data manager, External communication interface, 3D-capture, Stage free mode, EDS integration | ||
Options(for External Devices) | Energy dispersive X-ray spectrometry (EDS), Length dispersive X-ray spectrometry (WDS),Various external stages (heating stage, cooling stage, tensile stage) |