Items | Description | ||
---|---|---|---|
w/o Cs-corrector | w/ Cs-corrector | ||
Image resolution | 0.204 nm
guaranteed (at a magnification
of ×4,000,000) |
0.136 nm
guaranteed (HAADF-STEM image) 0.105 nm guaranteed (FFT)(at a magnification of ×7,000,000)(HR lens) |
|
Magnification | ×100 - ×10,000,000 | ||
Accelerating voltage | 200 kV, 120 kV *, 80 kV* | ||
Imaging signal |
Bright field STEM: Phase
contrast image (TE image) Dark field STEM: Z-contrast image (ZC image) Secondary electron image (SE image) Electron diffraction* Characteristic X-ray analysis and mapping(EDX)* EELS analysis and mapping(EV3000)* |
||
Electron optics | Electron source | Schottky emitter (w/o Cs-corrector) | |
Cold field emitter (w/Cs-Correcter,w/o Cs-corrector) | |||
Illumination lens system | 2-stage condenser lens | ||
Cs-corrector* | Mullipole transfer lens design | ||
Scanning coil | 2-stage electromagnetic coil | ||
ZC collection angle control | Projector lens design | ||
Electromagnetic image shift | ±1 µm | ||
Specimen stage | Specimen movement | X/Y = ±1 mm, Z= ±0.4 mm | |
Specimen tilt | Single-tilt holder: ±30° (Std. lens), ±18° (HR lens) |