Resolution | 0.10 nm
(lattice) 0.18 nm (point-to-point) |
|
---|---|---|
Accelerating voltage | 300 kV, 200 kV*1, 100 kV*1 | |
Magnification | Zoom mode | 1,000 - 1,500,000× |
SA mode | 4,000 - 500,000× | |
Low mag mode | 200 - 500× | |
Erectron gun | Filament | LaB6 (DC heating) |
Filament exchange | Automated gun lift | |
High voltage cable | Resistor cable | |
Illumination system | Lens | 4-stage lens system |
Condenser aperture | Click-stop 4-openings | |
Probe size |
Micro mode: 0.05 - 0.2
µm (4 steps) Nano mode: 1 - 10 nm (4 steps) |
|
Beam tilt | ±3° | |
Imaging system | Lens | 5-stage lens system |
Focusing | Image
wobbler Astigmatism correction by stigmonitor Optimum focus |
|
Objective aperture | Click-stop 4-openings | |
Selected area aperture | Click-stop 4-openings | |
Erectron diffraction |
Selected-area electron
diffraction Nano probe electron dilfraction Convergent-beam electron diffraction |
|
Camera length | 250 - 3,000 mm | |
Specimen chamber | Specimen stage | Eucentric 5-axis Hiper goniometer stage |
Specimen size | 3 mmΦ | |
Stage translation | X/Y = ±1
mm, Z = ±0.3 mm Motor drive by CPU control |
|
Specimen position display | Auto-drive, Auto-trace | |
Specimen tilt | α = ±15°, β
= ±15° (Hitachi double tilt specimen holder*2) |
|
Anti-contamination | Cold block | |
Baking function | Mild baking function | |
Viewing chamber | Fluorescent screen | Main
screen: 110 mmΦ Focusing screen: 30 mmΦ |
Optical viewer | 7.5× | |
Camera chamber | Field selection | Full/half exposure |
Film | 25 sheets (2 sets of film magazines) | |
GUI | Monitor | 19 inch monitor |
Functions | Database, measurement, image processing | |
Digital CCD camera*3 | Camera coupling | Lens coupling |
Effective pixels | 1,024 × 1,024 pixels | |
A/D resolution | 12 bits | |
Vacuum system | Electron gun | Ion pump: 60 L/s |
Column | TMP: 260 L/s | |
Viewing/camera chamber | Diffusion
pump: 280 L/s Fore pump: 135 L/min. × 3 sets |
*1 Magnification is calibrated as an option
*2 An optional item
*3 This specification applies to an optional 1,024 × 1,024 pixel digital CCD-camera.
The above specifications are guaranteed at an accelerating voltage of 300 kV