Model name | TM4000Plus II | TM4000 II |
---|---|---|
Magnifications |
10× - 100,000×
(Photographic
magnification) 25× - 250,000× (monitor display magnification) |
|
Accelerating voltage | 5 kV, 10 kV, 15 kV, 20 kV | |
Image signal |
Backscattered electron Secondary electron Mix (Backscattered electron + Secondary electron) |
Backscattered electron |
Vacuum mode | BSE:
Conductor/Standard/Charge-up
reduction SE: Standard/Charge-up reduction Mix: Standard/Charge-up reduction |
BSE: Standard/Charge-up reduction |
Sample stage traverse | X: 40 mm, Y: 35 mm | |
Maximum sample size | 80 mm (diameter), 50 mm (thickness) | |
Electron gun | Pre-centered cartridge tungsten filament | |
Signal detection system |
High-Sensitivity 4-segment
BSE detector High-Sensitivity Low-Vacuum SE detector (UVD) |
High-Sensitivity 4-segment BSE detector |
Evacuation system (vacuum pump) |
Turbo molecular pump : 67
L/s×1 unit Diaphragm pump : 20 L/min×1 unit |
|
Size / weight |
Main unit (motorized
stage): 330 (width)×614
(depth)×547 (height) mm, 54
kg Main unit (manual stage): 330(width)×617(depth)×547(height) mm, 54 kg Diaphragm pump: 144 (width)×270 (depth)×216 (height) mm, 5.5kg |