Sample size | Maximum 50 mm in size and 12 mm thick |
---|---|
Sample stage | 5-axis motorized eucentric tilting stage |
Accelerating Voltage | 1 - 30 kV
(0.5 kV - *optional) (0.5 - 1.0 kV : 0.1 kV step) (1.0 - 2.0 kV : 0.2 kV step) |
SIM Resolution | 4 nm@30 kV |
Maximum Probe Current | 90 nA |
Maximum Current Density | 50 A/cm2 |