FIB column | |
---|---|
Resolution (SIM) | 4 nm @ 30kV, 60 nm @ 2kV |
Acceleration voltage | 0.5 kV - 30 kV |
Beam current | 0.05 pA - 100 nA |
FE-SEM column | |
Resolution | 2.8 nm @ 5kV, 3.5 nm @ 1kV |
Acceleration voltage | 0.5 kV - 30 kV |
Electron source | Cold cathode field emission source |
Detector | |
Standard detector | Upper/Lower SED & BSED |
Stage | X: 0 - 205
mm Y: 0 - 205 mm Z: 0 - 10 mm R: 0 - 360° infinite T: -5 - 60° |