Items | Description | |
---|---|---|
SEM | Electron source | Cold cathode field emission source |
Accelerating voltage | 0.1 - 30 kV | |
Resolution | 2.1 nm@1 kV | |
1.6 nm@15 kV | ||
FIB | Ion source | Ga liquid metal ion source |
Accelerating voltage | 0.5 - 30 kV | |
Resolution | 4.0 nm@30 kV | |
Maximum probe current | 100 nA | |
Standard detector | In-column SED / In-column BSED / Chamber SED | |
Stage | X | 0 - 20 mm *2 |
Y | 0 - 20 mm *2 | |
Z | 0 - 20 mm *2 | |
θ | 0 - 360° *2 | |
τ | -25 - 45° *2 | |
Maximum sample size | 6 mm x 6 mm, 2 mm thick |