Specifications | AFM5300E | Optional Accessories |
---|---|---|
Manual Stage | XY ±2.5mm | |
Sample Size | 25mm
(diameter) Thickness: 10mm |
|
Scan range (Select at least one) |
20µm × 20µm × 1.5µm | 100µm ×
100µm × 15µm 150µm × 150µm × 5µm Closed Loop Scanner XY 1.5µm |
Detection | Optical
Lever (Low-coherence light) |
|
Optical Microscope *Top view (Select at least one) |
Zoom
Microscope (Lens magnification: x7) Metallurgical Microscope (Lens magnification: × 5, × 20, × 50) |
|
Vibration Isolation | Floor-model | |
Temperature Control | -120°C to
300°C R.T. to 800°C In liquid: from R.T. to 60°C |
|
In Liquid | ✔ | |
Humidity Control | 20 to 80%RH | |
Vacuum | Turbo-molecular Pump & Rotary Pump (9.9x10-5Pa) |