Stage | Automated,
fully addressable 100 mm (4
inch) stage Travel range: XY ±50 mm (2 inch), Z ≥21 mm Minimum step size: XY 2 µm, Z 0.04 µm |
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Sample Size |
Diameter:100 mm (4 inch) Thickness: 20 mm Weight: 2 kg |
Scan Range | 200 µm x 200 µm x 15 µm (XY: Closed loop control, Z: Displacement sensor) |
RMS Noise Level* | ≤0.04 nm (High-resolution mode) |
Repeatability* | XY: ≤15 nm(3σ, measuring 10 µm pitch)/Z: ≤1 nm (3σ, measuring 100 nm depth) |
XY Orthogonality | ±0.5° |
Bow* | ≤2 nm/50 µm |
Detection | Optical lever (Low-coherence light) |
Top-viewOptical Microscope | Zoom
magnification: x1 ~ x7 Field of vision: 910 µm x 650 µm ~130 µm x 90 µm Monitor magnification: x465 ~ x3255 (27 inch monitor) |
Anti-vibration | Desktop active anti-vibration 500 mm(W) x 600 mm (D) x 84 mm (H), approximately 28kg |
Soundproof Cover | 750 mm(W) x 877 mm (D) x 1400 mm(H), approximately 237 kg |
Size | 400 mm(W) x 526 mm(D) x 550 mm(H), approximately 90 kg |
RealTune® II | Automatic
tuning of cantilever amplitude
(DFM), contact force, scan
speed, and feedback gains (Various tuning modes including Auto, Fast, Soft, Rough, and Point) |
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Various Functions | Operating instructions; Tab structure (Measurement/ Analysis); Measurement area indicator/ Measurement area tracking window; Batch processing; and Tip calibration |
Operating Voltage | 0~150 V |
Multi Channel (Data Points) |
4 channels
(max. 2048 x 2048) 2 channels (max. 4096 x 4096) |
Rectangular Scan | 2:1, 4:1, 8:1, 16:1, 32:1, 64:1, 128:1, 256:1, 512:1, 1,024:1 |
Analysis Software | 3D display and overlay, Roughness, Cross-section, Average cross-section |
Automated Functions | Automated cantilever exchange and laser alignment |
Size | 340 mm(W) x 503 mm(D) x 550 mm(H), approximately 34 kg |
Power Supply | AC 100~240 V ±10% |
Measurement Modes | AFM(contact mode), DFM (tapping mode), PM, FFM, LM-FFM, VE-AFM, Adhesion, Current, Pico-Current, SSRM, PRM, KFM, EFM(AC), EFM(DC), MFM, SIS-Topography, SIS-Property |
Compatible Hitachi SEM | SU8240, SU8230 (H36 mm), SU8220 (H29 mm) |
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Sample Holder Size | 41 mm(W) x 28 mm(D) x 16 mm(H) |
Sample Size | Φ20 mm x 7 mm |
Alignment Accuracy | ±10 µm (AFM alignment accuracy) |