The Q150R is a compact rotary-pumped coating system suitable for SEM sputtering with non-oxidising (noble) metals - e.g. gold (Au), gold/palladium (Au/Pd) and platinum (Pt) - and for carbon coating SEM specimens for EDS and WDS.
The Q150R is available in three formats: sputtering (Q150R S), carbon fibre coating (Q150R E) and a combined sputtering and carbon fibre coating system (Q150R ES).
• Metal sputtering or carbon coating, or both - in one space-saving format
• Rotary-pumped sputter coating - allows sputtering of a range of non- oxidising (noble) metals (e.g. Au, Pt, Ag and Pd)
• Carbon fibre coating - ideal for SEM carbon coating applications (EDS and WDS)
• Controlled pulse carbon cord evaporation - precise control, reduced carbon debris
• Precise thickness control using the film thickness monitor option
• Fully automatic touch screen control - rapid data input, simple operation
• Easy-to-change, drop-in style specimen stages (rotation stage as standard)
• Three-year warranty
Ideal for W-SEM sputtering and carbon coating applications
The Q150R is a rotary pumped coater available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the Q150R can be a sputter coater for scanning electron microscopy (SEM), a carbon coater suitable for SEM (e.g. EDS and WDS), or both in a single, easy-to-use system.
Note: For field emission (FE) SEM and for TEM-quality carbon coating, please the turbo-molecular pumped Q150T
Molded case with colour touch screen
The Q150R is presented in a custom-molded, one-piece case which allows easy access for servicing. The embedded, colour touch screen allows multiple users to input and store coating ‘recipes’. The case houses all the working components, including an automatic bleed control that ensures optimum vacuum conditions during sputtering.
The vacuum chamber has an internal diameter of 150 mm/6” and comes with an integral implosion (safety) guard.
A variable-speed rotary specimen stage
is fitted as standard with other stages
available as options.
Sputter coating, carbon coating - or both
The Q150R is available in three formats, each with a range of optional accessories:
• Q150R S
A rotary-pumped sputter coater for non-oxidising (noble) metals. A gold (Au) target is fitted as standard, with other metals - such as gold/palladium (Au/Pd) and platinum (Pt) - available as options.
• Q150R E
A compact rotary-pumped carbon fibre coater, suitable for W-SEM EDS and WDS applications. Fitted as standard with a carbon fibre evaporation head insert, an optional carbon rod insert is also available.
• Q150R ES
A combined system with both sputtering and carbon coating. The deposition inserts can be swapped in seconds and the intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.
All models can be fitted with a range
of optional accessories (a carbon rod
coating insert, film thickness monitor,
glow discharge etc.).
Please note that for sputtering platinum (Pt) the optional 13711 Pt coating vacuum hose assembly is required .
Controlled pulse carbon cord evaporation
Installed as standard on E and ES models, controlled profiles ensure carbon is evaporated in short pulses. This significantly reduces or eliminates the amount debris (large carbon fragments) associated with traditional carbon "flash" evaporation. Plus it allows carbon cord evaporation to be accurately controlled using the optional film thickness monitor (FTM) accessory.
Rapid data entry
At the operational heart of the Q150R is a simple colour touch screen, which allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored.
The intuitive touch screen interface features maintenance prompts which highlights time of the last clean, coating time since last clean, system ‘on time' and time of the last service.
A suitable rotary vacuum pump is
required. The Pfeiffer DUO 6 5 m3/hr
two-stage rotary vacuum pump is ideal
for this purpose.
Options and accessories
The Q150R has an extensive range of
options and accessories, including a
glow discharge insert, film thickness
monitor (FTM) and specimens stages to
suit most applications.