The Alpha-Step IQ stylus-based surface profiler combines high measurement precision with
versatility and economy. Ideal for semiconductor pilot lines and materials research, this
advanced surface profiler enables faster process learning and higher yields. With guaranteed
8Ã… (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step
IQ surface profiler provides excellent repeatability and performance to analyze and monitor
• Provides advanced and customizable 2D surface analysis capabilities.
• Enables easy location of measurement features via saved site image
• Features excellent repeatability and reproducibility.
• Precisely determines and analyzes thin step heights, surface
microroughness,and overall form error on thin film surface coatings.
• Provides sufficient vertical range for large topography variations.
• Includes multiple language support for users with a worldwide presence.
• Enables faster analysis routines by applying saved sets of analysis
Comprehensive Surface Profiler Solutions
The P-16 and P-16OF (3D benchtop surface profiler), Alpha-Step IQ (2D benchtop
surface profiler), HRP 350 series (high resolution surface profiler) provide
comprehensive surface metrology analysis and surface topography control solutions
to meet the needs of the most demanding surface profiling applications.