The MicroXAM represents a series of optical surface profiler that support
a wide range of surface topography
applications. The technology, originally
engineered by a team of world class scientists at Phase Shift Technologies,
Inc., continues to evolve. Applications are diverse, including measurement
of text heights for complex MEMS structure, quantification of surface
texture of biological arterial stents, and control of laser texture bump
profiles on hard drive disk media.
Optical interferometer offers a unique capability to capture 3D surface
maps, yet also measuring film thickness of transparent materials. Complex
algorithms have been optimized to handle these material dependencies
to offer the most accurate measurements. Furthermore, the powerful
yet simple to use MapVUE™
analysis software package
offers the user an endless number of
parameter calculation, filtering
options, and imaging analysis to meet
the most stringent R&D needs. The
flexibility of the instruments is
further demonstrated with its mix of
optical objectives and sample stage
available to meet the need of each
As process development begins to mature, the MicroXAM readily adapts
to production environments where "hands free" process control is critical.
The easy to use interface offers simple recipe development, automated
sequencing, and simple yet powerful analysis tools.
The MicroXAM series of optical profilers offers the widest range of capability,
supporting the broadest application in surface measurement - with quick measurement
speeds at high precision and accuracy.
3-D interface profiling splits a beam of light, reflecting it off both the test and
reference surface. The light then recombines and interference patterns are detected
by a high resolution camera. This information is then interpreted to provide height
information on a pixel basis, building a complete 3-D surface map.
A variety of objectives ranging from 2.5X to 50X are available to support both
micro-and micro-topography applications. An optional four-position magnification wheel
extends flexibility, supporting different field of view requirements. The standard analog
camera can be upgraded to a higher resolution digital camera for application requiring additional pixel detail.
Motorized sample stages - from 4 to 8 inches - support a wide range of sample sizes.
The MapVUE AE software controlling MicroXAM is a comprehensive graphical software package for
the acquisition, analysis, and visualization of data. It offers simple to use recipe development
features, as well as advanced post-measurement analysis capability. With it, you can filter and
mask data, stitch multiple images for macro-analysis, and to calculate 2D and 3D surface parameters,
such as volume and area differences.