3000 times higher sensitivity than conventional LEIS
The Qtac is a high sensitivity low energy ion scattering (LEIS) instrument.
It is extremely surface sensitive, providing elemental and structural
characterisation of the top atomic layer. This new generation instrument
has been developed to include small spot analysis, surface imaging, and
both static and dynamic depth profiling. Its unique surface sensitivity
makes the Qtac the perfect tool to study surface processes. The Qtac provides
valuable information in many production and research areas on materials such as
catalysts, semiconductors, metals, polymers, fuel cells, and biomaterials.
Key features of LEIS
• 3000 times higher sensitivity than conventional LEIS instruments
• Quantitative, elemental characterisation of the top atomic layer
• Spectroscopy, imaging and depth profiling capabilities
• Time-of-flight mass filtering for improved sensitivity
• Analysis of rough and non-conductive materials
The tool of choice for front-end process issues at 32nm node and beyond
The stand-alone version of the Qtac is based on a field-proven instrument platform.
The modular design is ideal for customisation and the integration of a large variety
of UHV preparation techniques. It is also possible to couple the Qtac100 to other
floor standing instruments.
TOF.SIMS 5 with Qtac Extension
For many samples, including those with sensitive surfaces,
the in-situ transfer between analytical techniques is very
useful, avoiding contamination between analyses, and permitting
direct comparison of results. The combination of the Qtac with
the time-of-flight secondary ion mass spectrometer TOF.SIMS 5
makes a very effective tool for inorganic and organic surface
analysis. The combination provides top atomic layer analysis,
surface chemical mapping, static and dynamic depth profiling, 3D
chemical imaging, layer thickness
measurement and quantification.
Adding the Qtac to Other Instrumentation
Many manufacturing, surface treatment, and thin layer deposition
techniques benefit from on-line quality control. For coverage and
layer thickness measurements, the Qtac makes an ideal addition.
The Qtac is available as a bolt-on system, tailored to individual
requirements, for laboratory instruments or industrial tools. ALD
and MBE instrumentation are typical examples.