Universal Magnetic Sector SIMS for Materials Science:
The CAMECA IMS 7f is a
double-focusing magnetic sector SIMS
with well established analytical
performances: it combines extreme
sensitivity, high mass resolution, high
dynamic range and low detection limits
on light and trace elements.
Key analytical features for solving a wide range of analytical problems...
The IMS 7f
offers unparalleled depth
with high depth resolution and high
dynamic range. A high efficiency optical
gate is used to eliminate crater edge
effects, and the high mass resolution
ensures true elemental analysis by
eliminating the numerous interfering
ions (31P/30SiH, 56Fe/28Si2…). The high
transmission mass spectrometer is
combined with two reactive, high-density
ion sources, O2+ and Cs+, thus providing
high sputter rate
and excellent detection
Thanks to a unique stigmatic optical
system, the IMS 7f
performs both direct ion microscopy and
scanning microprobe imaging. Besides,
its electron flood gun provides a unique
self-compensation mode that makes it
possible to measure depth profiles on
complex insulating structures.
Therefore, the IMS 7f proves extremely useful for addressing the most diverse issues in materials analysis: doping concentration and distribution, impurity control, layer interface quality (junction impurities, diffusion of contaminants,...), successfully reducing R&D cycle times and enhancing production yields.