Full Wafer Magnetic Sector SIMS for Advanced Semiconductor Metrology
The CAMECA IMS Wf is a fully automated ion microprobe with benchmark performance in semiconductor
ultra low energy depth profiling. It fulfills an increasing demand for fast SIMS analysis and
monitoring of surface contamination in ultra shallow implants and thin layers.
Full wafer mapping & analysis capabilities
Derived from the SC Ultra (magnetic sector SIMS combining
Energy capabilities with high mass resolution and high sensitivity), the
IMS Wf adds full
300mm wafer mapping and analysis capabilities.
Wafer handling is performed by means of a robot and a shuttle designed to accommodate wafer sizes from 50 to 300 mm in diameter.
Automation and ease of use
A pattern recognition system option and a cassette to cassette loader provide the ability to perform
measurements on patterned wafers. The IMS Wf
therefore addresses a wide range of applications in semiconductor technology: Si, III-V compounds...
Thanks to its high level of automation, the CAMECA
IMS Wf performs fast deep depth profiling with
optimized sample throughput and excellent measurement
stability, ensuring unequaled SIMS tool productivity.
High Performance Magnetic Sector SIMS for Advanced Semiconductors
The CAMECA SC Ultra has been specifically designed to meet the increasing needs for dynamic SIMS measurements in advanced semiconductors.
From standard to ultra-shallow depth profiling
A first requisite to the analysis of advanced semiconductors is the optimization of SIMS analytical
conditions for ultra-shallow depth profiling without giving up standard depth profiling applications.
CAMECA has therefore developed a SIMS instrument capable of sputtering samples with a large range of
impact energies: from high energy (keV range) for thick structures to Ultra-Low Energy (≤ 150eV) for
ultra-thin structures. This flexibility in the impact energy choice is available for different
well-controlled sputtering conditions (species, incidence angle, etc...).
The design of the CAMECA SC Ultra is quite unique: along with the CAMECA IMS Wf, it is the only
SIMS instrument offering
Energy capabilities with no compromise on high mass
resolution and high transmission.
Due to the increasing complexity of manufacturing processes, measurements from
small test areas
of patterned wafers are now preferred to blank wafer analysis, in order to be really representative
of the product. This limits the volume of matter available for the analysis and therefore increases
the need for high transmission instruments (magnetic sector SIMS capable of high sensitivity from
small sputtered craters).
High automation level
As SIMS technique matures, users want to reduce the expertise required to
achieve high reproducibility and high precision measurements. The trend is
clearly toward unattended, automated analysis. The CAMECA
SC Ultra faces
this challenge with its largesample holder to load batches of several tens
of samples, and with its computer automation controlling all analytical paramaters (analysis recipe, instrument set-up, etc...).
In-depth profile through aMulti Quantum Well structure typesemiconductor integrated laser.