3D overlay without topography
correction: SiN (red), Ge
(orange), SiO2
(yellow) and Si (green).Field
of view: 25 x 25 µm2 |
3D overlay with topography
correction: SiN (red), Ge
(orange), SiO2
(yellow) and Si (green).
Field of view: 25 x 25 µm2 |