The flexible, high precision sample manipulators as well as the perfect charge compensation
allow the analysis of virtually all kinds of samples, making our instruments the most flexible
SIMS tools in the market.
Due to the modular design, the instruments can be configured with a selection of optimised ion guns,
sample preparation facilities and a variety of special accessories in order to address even the most
challenging analytical tasks. The computer control of all instrument functions and parameters ensures
ease-of-use and a high level of automation.
The Flexible Tool for the Semiconductor Industry
The TOF.SIMS 300 is especially designed for the demands of the semiconductor industry.
Its applications include trace metal detection with detection limits down to 108 atoms/cm2,
detection of organic surface contaminants, high performance profiling of implants and
characterisation of sub-micrometer structures and defects. In addition to the TOF.SIMS 5
flexibility, performance and stability, it offers a full 300 mm wafer handling capability.
The instrument is fully computer controlled to ensure ease-of-operation, high sample
throughput and a high level of automation.
The TOF.SIMS 300 also provides excellent sample observation and navigation features. Two
video cameras for real-time sample viewing, ion induced secondary electron imaging and
sophisticated navigation software supply all information necessary for precise sample
positioning. The software complies with the data standard of all defect review tools.