The flexible, high precision sample manipulators as well as the perfect charge compensation
allow the analysis of virtually all kinds of samples, making our instruments the most flexible
SIMS tools in the market.
Due to the modular design, the instruments can be configured with a selection of optimised ion guns,
sample preparation facilities and a variety of special accessories in order to address even the most
challenging analytical tasks. The computer control of all instrument functions and parameters ensures
ease-of-use and a high level of automation.
Superior Performance for all SIMS Applications
TOF-SIMS is an acronym for the combination of the analytical technique SIMS (Secondary Ion Mass
Spectrometry) with Time of Flight mass analysis (TOF). In different operational modes - surface
spectroscopy, surface imaging, depth profiling, 3D analysis - this analysis technique offers unique
detection of all elements and isotopes chemical information via molecular and cluster ions Detection Limits
ppm of a monolayer for elements sub-fmol for molecules Spatial Location
high lateral resolution (< 60 nm) high surface sensitivity (< 1 nm) high depth resolution (< 1 nm)
The TOF.SIMS 5 provides detailed elemental and molecular information about surface, thin layers, interfaces of the
sample, and gives a full three-dimensional analysis. Its unique design guarantees optimum performance in all fields
of SIMS applications. The product line includes:
4" version for sample sizes up to 100 mm in diameter
8" version for sample sizes up to 200 mm in diameter
12" version for sample sizes up to 300 mm in diameter
The basic instrument is equipped with a reflectron TOF analyser giving high
secondary ion transmission with high mass resolution, a sample chamber with
a 5-axis manipulator (x, y, z, rotation and tilt) for flexible navigation,
a fast entry load-lock, charge compensation for the analysis of insulators,
a secondary electron detector for SEM imaging, state of the art vacuum system,
and an extensive computer package for automation and data handling.
A variety of different options and accessories such as sample heating and
cooling for analysis of volatiles, laser post ionization of neutrals etc.
Configurations including in-situ sample preparation chambers and sample
transfer systems are also available. In particular ultra high vacuum
combination with XPS, Auger and other instruments allows multi-technique
analysis without exposure of the sample to air (see Customised Systems).