Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System
Collect angle-resolved spectra without the need to tilt the sample to nondestructively characterize ultra-thin layers using the Thermo Scientific™ Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System.
New and emerging technologies rely on the engineering of the near-surface region of a solid surface. For this type of material, including self-assembled monolayers, surface modified polymers and semiconductor devices, it is essential that the composition of the first few nanometers is known with confidence. The Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System provides this information using parallel angle resolved XPS (PARXPS) and the advanced software of the Avantage data system, which produces accurate and precise answers.
Description
The Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System Features:
• Patented technology provides the unique ability to collect angle-resolved XPS spectra over a 60° angular range in parallel
• X-ray monochromator features a user-selectable spot size in the range 15 to 400µm
• System is able to handle large or multiple samples
• CCD sample alignment microscope is perpendicular to the sample surface
Lens, Analyzer and Detector
• Radian lens collects photoelectrons with an electrostatic lens having a large angular acceptance (60°)
• Large angle maximizes sensitivity and allows a large angular range to be collected in PARXPS measurements
• Lens axis is 50° from the sample normal, so electrons are collected 20 to 80° (relative to the sample normal)
• The 180° spherical sector analyzer is fitted with a two-dimensional detector in the output plane
• Two-dimensional detector provides multi-channel detection, up to 112 energy channels and up to 96 angular channels
• Lens can be operated in two modes: conventional mode or angle- resolving
X-ray Source
• Fitted with a micro-focusing monochromator
• X-ray spot size ranges from 15 - 400µm
Depth Profiling
• Digitally-controlled EX05 ion gun can be used to provide depth profiles even when using low energy ions
• Azimuthal sample rotation available for depth profiling
Sample Handling
• Fully motorized stage capable of five axes of movement
• Stage can accommodate large samples—movement range in X and Y is 70 mm and 25 mm in Z (height)
Vacuum System
• 5mm thick mu-metal analysis chamber maximizes efficiency of magnetic shielding
• Increased effectiveness compared to shielding methods that use internal or external shields
Avantage Data System
• Integrates all aspects of the analysis, including instrument control, data acquisition, data processing and reporting
• Allows remote control and easy interfacing to third-party software such as Microsoft Word
• Manages total analysis process from sample to report
| Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System |